Power Tools for Technical Communication:
Evaluating Oral-Report Scripts

In this lab, you evaluate the script of an oral report:
  1. Study the script of the oral report below, paying particular attention to how well it meets the guidelines in Chapter 16 of Power Tools for Technical Communication.
  2. Make a copy of the evaluation chart at the end of Chapter 16, and fill it out with your evaluation of the oral report below.
  3. Put your name, Oral Report 1: Evaluation, and the date on this document, and send it to your instructor.

Explanation of the Context

Purpose: The purpose of this oral report is to give a brief familiarization of the training manual that will be utilized by all personnel that operate the Sputtering system.

Audience: This presentation will target operators but will also include shift managers, module managers, engineers, maintenance technicians, and other members that are involved in the approval process of any training development.


Oral Report: Basic Preventive Maintenance on Sputtering Systems

Hello everyone, my name is Alfredo Sanchez-Pena and I will be conducting this presentation. I've been a member of the semiconductor manufacturing industry for the past four years. As a wafer fab techncian, I have found it necessary to have a written manual for proper and consistent training on various tools. In my report, you will find a training manual for performing basic preventive maintenance on sputtering systems. The general purpose for the sputtering system is to lay a thin film of metal as part of a process flow of a device. With all tools, there exist a standard procedure of performing proper maintenance in order to decrease down time of that equipment. To fully understand the proper procedures for maintaining a sputtering system, the report will:

  1. Provide instruction combined with certified supervision on how to perform a physical vapor deposition (PVD) kit change as well as a PVD target change.
  2. Identify best practices for performing successful and quick turnaround PVD kit change and target preventive maintenance (PM).
  3. Provide instruction on performing all procedures associated to process kit change PM.
  4. Certify an operator/technician candidate as capable of performing a PVD process kit PM for sputtering systems.

What is a sputtering system and what is its purpose? Sputtering is a process that can deposit any material on any substrate. Sputtering, like evaporation, takes place in a vacuum. However, it is a physical, not a chemical process, and is referred to as physical vapor deposition (PVD). It is a metallization process.

Before you begin to perform any PMs, you must ensure all operators know the proper procedures for placing a tool down. This allows consistent tracking of downtimes for all tools and provide written explanation of actual performance of tools. Proper procedures include familiarization of functions within the operating system. Prior to any actual maintenance, you must make sure that all required tools and parts are present. This will prevent additional down time.

Once the tool is properly set up for the PM, you then perform the required steps as listed in the report to cool and vent the chamber. This must be performed prior to performing a kit and or a target change. Once conditions have been met prior to opening chamber, you can follow the step-by-step procedure to perform a kit and or target change.

While performing the procedures for a kit and or target change, you must also check for others conditions that may require maintenance activities, for instance, regeneration of cryopumps. This will decrease the overall down time of the sputter system. Once kit and or target changes have been performed, then you can proceed to allow the tool to complete the remaining steps for a proper PM. While the tool is completing the PM process, operators should utilize this time to reassemble kits for future PMs. They should also begin to clean the immediate area and return all parts and tools. Although the tool will complete these finals steps, operators must be familiar with all of the required steps from start to finish of the PM, in case the final steps require operator assistance.

Once the PM is complete, you must condition and qualify the tool before releasing it to full production. This includes running paste (conditioning), particle checks, and checking thickness of film. Without proper conditioning, you run the risk of defect issues. Full qualifications are necessary to guarantee the tool is running according to specifications.

As the manual I have developed will explain, allowing operators to become certified in performing PMs on sputtering systems will allow better utilization of human resources. As the industry increases production, it is important to release maintenance technicians and engineers from having to perform routine PMs.

As the need for integrated circuits continues to increase, semiconductor manufacturing companies will stress the need to enforce efficient use of time and personnel. Having a manual to explain the step-by-step procedures for performing PMs on sputtering systems will provide a resource for those certified and also provide instructions for those operators needing certification. For more detailed information on performing preventive maintenance on sputtering systems, please request a copy of my technical report, Preventive Maintenance in Performing Kit and Target Changes for Sputtering Systems. Thank you for your time and attention and are there any questions?

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